A Fixed Path Acoustic Interferometer for the Study of Matter
- 期刊名称Review of Scientific Instruments
- 作者Hubbard, J. C.; Zartman, I. F.
- 卷第10卷
- 期第12期
- 印刷ISSN0034-6748
- 文件大小557.17KB
- 发表时间1939
- DOI10.1063/1.1751471
ChemInform Abstract: Silicon Dioxide Deposition by Atmospheric Pressure and Low-Temperature CVD Using TEOS and Ozone.FUJINO, K.; NISHIMOTO, Y.; TOKUMASU, N.; MAEDA, K. · ChemInform · 1990
[IEEE 1991 Eighth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (11-12 June 1991)] 1991 Proceedings Eighth International IEEE VLSI Multilevel Interconnection Conference - Reaction mechanism of TEOS and O/sub 3/ atmospheric pressure CVDFujino, K.; Nishimoto, Y.; Tokumasu, N.; Maeda, K. · 1991
[IEEE Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (12-13 June 1989)] Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference - Dielectric film deposition by atmospheric pressure and low temperature CVD using TEOS, ozone, and new organometallic doping sourcesNishimoto, Y.; Tokumasu, N.; Fujino, K.; Maeda, K. · 1989