![Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage]()
Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storageChui, B.W.; Stowe, T.D.; Yongho Sungtaek Ju, ; Goodson, K.E.; Kenny, T.W.; Mamin, H.J.; Terris, B.D.; Ried, R.P.; Rugar, D. · Journal of Microelectromechanical Systems · 1998