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[IEEE 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Cannizzaro, Catania, Italy (2007.10.2-2007.10.5)] 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - First Quantitative Observation of Local Temperature Fluctuation in Millisecond AnnealingKubo, T.; Sukegawa, T.; Takii, E.; Yamamoto, T.; Satoh, S.; Kase, M. · 2007

[IEEE 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers. - Honolulu, HI, USA (June 13-15, 2006)] 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers. - Advanced Junction Profile Engineering Featuring Laser Spike Annealing and Co-Implantation for Sub-30-nm Strained CMOS DevicesYamamoto, T.; Kubo, T.; Sukegawa, T.; Hashimoto, K.; Kase, M. · 2006