![[IEEE 2005 International Conference on MEMS,NANO and Smart Systems - Banff, AB, Canada (24-27 July 2005)] 2005 International Conference on MEMS,NANO and Smart Systems - Optical MEMS pressure sensor using ring resonator on a circular diaphragm]()
[IEEE 2005 International Conference on MEMS,NANO and Smart Systems - Banff, AB, Canada (24-27 July 2005)] 2005 International Conference on MEMS,NANO and Smart Systems - Optical MEMS pressure sensor using ring resonator on a circular diaphragmPattnaik, P.K.; Vijayaaditya, Bh.; Srinivas, T.; Selvarajan, A. · 2005