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NEMS Switches Monolithically Fabricated on CMOS MIM CapacitorsJ. Muñoz-gamarra; A. Uranga; N. Barniol · 2014

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Resolution limits of optical lithographyOkazaki, Shinji · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures · 1991

Review of scanning force microscopySarid, Dror · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures · 1991

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