![Mechanical and Chemical Properties of CBxNy and CSixNy Thin Films Grown by N*-Plasma Assisted Pulsed Laser Deposition]()
Mechanical and Chemical Properties of CBxNy and CSixNy Thin Films Grown by N*-Plasma Assisted Pulsed Laser DepositionThärigen, T.; Riede, V.; Lippold, G.; Hartmann, E.; Hesse, R.; Streubel, P.; Lorenz, D.; Grau, P.; Lorenz, M. · MRS Proceedings · 1999