![SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] Optical Sensors 2008 - A compact high-sensitivity heterodyne interferometer for industrial metrology]()
SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] Optical Sensors 2008 - A compact high-sensitivity heterodyne interferometer for industrial metrologySchuldt, Thilo; Berghmans, Francis; Mignani, Anna G.; Gohlke, Martin; Weise, Dennis; Cutolo, Antonello; Meyrueis, Patrick P.; Peters, Achim; Johann, Ulrich; Pearsall, Thomas P.; Braxmaier, Claus · 2008