![Sputtering of aluminium nitride (002) film on cubic silicon carbide on silicon (100) substrate: influences of substrate temperature and deposition power]()
Sputtering of aluminium nitride (002) film on cubic silicon carbide on silicon (100) substrate: influences of substrate temperature and deposition powerIqbal, A.; Walker, G.; Hold, L.; Fernandes, A.; Lacopi, A.; Mohd-Yasin, F. · Journal of Materials Science: Materials in Electronics · 2019