![Precursor design for liquid Injection CVD of lead scandium tantalate thin films]()
Precursor design for liquid Injection CVD of lead scandium tantalate thin filmsJones, Anthony C.; Davies, Hywel O.; Leedham, Timothy J.; Wright, Peter J.; Lane, Penelope A.; Crosbie, Michael J.; Williams, Dennis J.; Jones, Jason C.; Reeves, Christopher L. · Integrated Ferroelectrics · 2000