Benchmarking of 50 nm features in thermal nanoimprint
- 作者C. Gourgon; N. Chaix; H. Schift; M. Tormen; S. Landis; C. M. Sotomayor Torres; A. Kristensen; R. H. Pedersen; M. B. Christiansen; I. Fernandez-cuesta; D. Mendels; L. Montelius; T. Haatainen
- 文件大小874.23KB
- 发表时间2007
- DOI10.1116/1.2794064
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