![[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Effect of nitrogen doping on the structure and properties of tetrahedral amorphous carbon films]()
[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Effect of nitrogen doping on the structure and properties of tetrahedral amorphous carbon filmsChen, Z.Y.; Yu, Y.H.; Zhao, J.P.; Shi, T.S.; Liu, X.H.; Zou, S.C. · 1998