Contents list
- 期刊名称Chem. Sci.
- 卷第5卷
- 期第11期
- 印刷ISSN2041-6520
- 电子ISSN2041-6539
- 文件大小4921.85KB
- 发表时间2014-09-29
- DOI10.1039/c4sc90041c
- 页码4109-4122
Fabrication of high aspect ratio nano gratings using SR lithographyFumiki Kato; Shinya Fujinawa; Yigui Li; Susumu Sugiyama · 2007
Development of an alternating magnetic-field-assisted finishing process for microelectromechanical systems micropore x-ray opticsRiveros, Raul E.; Yamaguchi, Hitomi; Mitsuishi, Ikuyuki; Takagi, Utako; Ezoe, Yuichiro; Kato, Fumiki; Sugiyama, Susumu; Yamasaki, Noriko; Mitsuda, Kazuhisa · ao/49/18/ao-49-18-3511.pdf · 2010
Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopesYuichiro Ezoe; Ikuyuki Mitsuishi; Utako Takagi; Masaki Koshiishi; Kazuhisa Mitsuda; Noriko Y. Yamasaki; Takaya Ohashi; Fumiki Kato; Susumu Sugiyama; Raul E. Riveros; Hitomi Yamaguchi; Shinya Fujihira; Yoshiaki Kanamori; Kohei Morishita; Kazuo Nakajima; Ryutaro Maeda · 2010
SPIE Proceedings [SPIE SPIE Europe Optics + Optoelectronics - Prague, Czech Republic (Monday 20 April 2009)] EUV and X-Ray Optics: Synergy between Laboratory and Space - Novel ultra-lightweight and high-resolution MEMS x-ray opticsMitsuishi, Ikuyuki; Hudec, René; Pina, Ladislav; Ezoe, Yuichiro; Takagi, Utako; Mita, Makoto; Riveros, Raul; Yamaguchi, Hitomi; Kato, Fumiki; Sugiyama, Susumu; Fujiwara, Kouzou; Morishita, Kohei; Nakajima, Kazuo; Fujihira, Shinya; Kanamori, Yoshiaki; Yamasaki, Noriko Y.; Mitsuda, Kazuhisa; Maeda, Ryutaro · 2009
SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Brisbane, Australia (Sunday 11 December 2005)] Device and Process Technologies for Microelectronics, MEMS, and Photonics IV - <title>Fabrication of submicron three-dimensional structure by plane-pattern to the cross-section transfer method using synchrotron radiation lithography</title>Kato, Fumiki; Fujinawa, Shinya; Tsudo, Makoto; Sugiyama, Susumu; Chiao, Jung-Chih; Dzurak, Andrew S.; Jagadish, Chennupati; Thiel, David V. · 2006
SPIE Proceedings [SPIE SPIE Europe Optics + Optoelectronics - Prague, Czech Republic (Monday 20 April 2009)] EUV and X-Ray Optics: Synergy between Laboratory and Space - Magnetic field assisted finishing of ultra-lightweight and high-resolution MEMS x-ray micro-pore opticsRiveros, Raul E.; Hudec, René; Pina, Ladislav; Yamaguchi, Hitomi; Mitsuishi, Ikuyuki; Takagi, Utako; Ezoe, Yuichiro; Kato, Fumiki; Sugiyama, Susumu; Yamasaki, Noriko; Mitsuda, Kazuhisa · 2009