![[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - A 10 μm thick poly-SiGe gyroscope processed above 0.35 μm CMOS]()
[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - A 10 μm thick poly-SiGe gyroscope processed above 0.35 μm CMOSScheurle, A.; Fuchs, T.; Kehr, K.; Leinenbach, C.; Kronmuller, S.; Arias, A.; Ceballos, J.; Lagos, M. A.; Mora, J. M.; Munoz, J. M.; Ragel, A.; Ramos, J.; Van Aerde, S.; Spengler, J.; Mehta, A.; Verbist, A.; Du Bois, B.; Witvrouw, A. · 2007