![SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 26 February 2006)] Smart Structures and Materials 2006: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems - Comparative analysis of distributed mass micromachined gyroscopes fabricated in SCS-SOI and EFAB]()
SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 26 February 2006)] Smart Structures and Materials 2006: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems - Comparative analysis of distributed mass micromachined gyroscopes fabricated in SCS-SOI and EFABTrusov, Alexander; Tomizuka, Masayoshi; Yun, Chung-Bang; Acar, Cenk; Shkel, Andrei M.; Giurgiutiu, Victor · 2006