Advance abstracts
- 期刊名称IEEE Spectrum
- 作者Hwang, Hyunsang; Ting, Wenchi; Kwong, Dim-Lee; Lee, Jack
- 卷第5卷
- 期第3期
- 印刷ISSN0018-9235
- 文件大小5765.33KB
- 发表时间1968-03
- DOI10.1109/mspec.1968.5214828
- 页码106-119
Atomic layer deposition reactor for fabrication of metal oxidesKrzysztof Kolanek; Massimo Tallarida; Marcel Michling; Konstantin Karavaev; Dieter Schmeisser · 2011
In situ study of the atomic layer deposition of HfO2 on SiKolanek, Krzysztof; Tallarida, Massimo; Michling, Marcel; Schmeisser, Dieter · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2012
In situ studies of the atomic layer deposition of thin HfO2 dielectrics by ultra high vacuum atomic force microscopeKrzysztof Kolanek; Massimo Tallarida; Konstantin Karavaev; Dieter Schmeisser · 2010
[IEEE 2009 International Students and Young Scientists Workshop "Photonics and Microsystems" - Wernigerode, Germany (2009.06.25-2009.06.27)] 2009 International Students and Young Scientists Workshop "Photonics and Microsystems" - In situ measurements of the atomic layer deposition of high-k dielectrics by atomic force microscope for advanced microsystemsKolanek, Krzysztof; Tallarida, Massimo; Karavaev, Konstantin; Schmeisser, Dieter · 2009
Charge transport in magnetronsRossnagel, S. M. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1987
Biomolecules and surfacesRatner, Buddy D. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1990
Studies in differential chargingBarr, Tery L. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1989
Material selection for hard coatingsHolleck, H. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1986
Hollow cathode magnetronWang, Zhehui; Cohen, Samuel A. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1999
Nanostructured materials for supercapacitorsMeyyappan, M. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2013
Design of functional coatingsHegemann, D.; Oehr, C.; Fischer, A. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2005
Depth profile optimizationNaumkin, A. V. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1994