![Multi-technique x-ray and optical characterization of crystalline phase, texture, and electronic structure of atomic layer deposited Hf1−xZrxO2 gate dielectrics deposited by a cyclical deposition and annealing scheme]()
Multi-technique x-ray and optical characterization of crystalline phase, texture, and electronic structure of atomic layer deposited Hf1−xZrxO2 gate dielectrics deposited by a cyclical deposition and annealing schemeVasić, Relja; Consiglio, Steven; Clark, Robert D.; Tapily, Kandabara; Sallis, Shawn; Chen, Bo; Newby, David; Medikonda, Manasa; Raja Muthinti, Gangadhara; Bersch, Eric; Jordan-Sweet, Jean; Lavoie, Christian; Leusink, Gert J.; Diebold, Alain C. · Journal of Applied Physics · 2013