![SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Design-Process-Technology Co-optimization for Manufacturability IX - A new lithography hotspot detection framework based on AdaBoost classifier and simplified feature extraction]()
SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Design-Process-Technology Co-optimization for Manufacturability IX - A new lithography hotspot detection framework based on AdaBoost classifier and simplified feature extractionSturtevant, John L.; Capodieci, Luigi; Matsunawa, Tetsuaki; Gao, Jhih-Rong; Yu, Bei; Pan, David Z. · 2015