![[IEEE 2002 Symposium on VLSI Technology Digest of Technical Papers - Honolulu, HI, USA (11-13 June 2002)] 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) - Integration of capacitor for sub-100-nm DRAM trench technology]()
[IEEE 2002 Symposium on VLSI Technology Digest of Technical Papers - Honolulu, HI, USA (11-13 June 2002)] 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) - Integration of capacitor for sub-100-nm DRAM trench technologyLutzen, J.; Birner, A.; Goldbach, M.; Gutsche, M.; Hecht, T.; Jakschik, S.; Orth, A.; Sanger, A.; Schroder, U.; Seidl, H.; Sell, B.; Schumann, D. · 2002