![Silane Flow Rate Dependence of SiO[sub x] Cap Layer Induced Impurity-Free Intermixing of GaAs/AlGaAs Quantum Wells]()
Silane Flow Rate Dependence of SiO[sub x] Cap Layer Induced Impurity-Free Intermixing of GaAs/AlGaAs Quantum WellsDeenapanray, Prakash N. K.; Tan, H. H.; Cohen, Michael I.; Gaff, Keith; Petravic, Mladen; Jagadish, C. · Journal of The Electrochemical Society · 2000