![Growth and interface of HfO[sub 2] films on H-terminated Si from a TDMAH and H[sub 2]O atomic layer deposition process]()
Growth and interface of HfO[sub 2] films on H-terminated Si from a TDMAH and H[sub 2]O atomic layer deposition processHackley, Justin C.; Demaree, J. Derek; Gougousi, Theodosia · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2008