![SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Design-Process-Technology Co-optimization for Manufacturability VIII - Localization concept of re-decomposition area to fix hotspots for LELE process]()
SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Design-Process-Technology Co-optimization for Manufacturability VIII - Localization concept of re-decomposition area to fix hotspots for LELE processSturtevant, John L.; Capodieci, Luigi; Yokoyama, Yoko; Sakanushi, Keishi; Kohira, Yukihide; Takahashi, Atsushi; Kodama, Chikaaki; Tanaka, Satoshi; Nojima, Shigeki · 2014