Design and fabrication of silicon condenser microphone using corrugated diaphragm techniqueQuanbo Zou; Zhijian Li; Litian Liu · 1996

A novel integrated silicon capacitive microphone-floating electrode "electret" microphone (FEEM)Quanbo Zou, ; Zhimin Tan, ; Zhenfeng Wang, ; Jiangtao Pang, ; Xin Qian, ; Qingxin Zhang, ; Rongming Lin, ; Sung Yi, ; Haiqing Gong, ; Litian Liu, ; Zhijian Li, · Journal of Microelectromechanical Systems · 1998

Theoretical and experimental studies of single-chip-processed miniature silicon condenser microphone with corrugated diaphragmQuanbo Zou; Zhijian Li; Litian Liu · 1997

CoMSaT: a single-chip fabrication technique for three-dimensional integrated fluid systemsQuanbo Zou; Zhenfeng Wang; Rongming Lin; Jiangtao Pang; Zhimin Tan; Xin Qian; Litian Liu; Zhijian Li · 1999

New methods for measuring mechanical properties of thin films in micromachining: Beam pull-in voltage (VPI) method and long beam deflection (LBD) methodQuanbo Zou; Zhijian Li; Litian Liu · 1995

[IEEE 4th International Conference on Solid-State and IC Technology - Beijing, China (24-28 Oct. 1995)] Proceedings of 4th International Conference on Solid-State and IC Technology - Study of methods for measuring mechanical properties of thin films in microelectromechanical systems (MEMS)Quanbo Zou, ; Zhijian Li, ; Litian Liu, · 1995

[IEEE Fifth International Conference on Solid-State and Integrated Circuit Technology-ICSICT'98 - Beijing, China (21-23 Oct. 1998)] 1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105) - The study of single-chip integrated microfluidic systemJiangtao Pang, ; Quanbo Zou, ; Zhimin Tan, ; Xin Qian, ; Litian Liu, ; Zhijian Li, · 1998