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Polycrystalline Silocon-Oxide-Nitride-Oxide-Silicon Flash Memory on SiO<sub>2</sub> and Si<sub>3</sub>N<sub>4</sub> Buffer Layer for System on Panels Application

Polycrystalline Silocon-Oxide-Nitride-Oxide-Silicon Flash Memory on SiO2 and Si3N4 Buffer Layer for System on Panels Application

Lee, Sang Youl; Oh, Jae Sub; Yang, Seung Dong; Yun, Ho Jin; Jeong, Kwang Seok; Kim, Yu Mi; Lee, Hi Deok; Lee, Ga Won
  • 期刊名称Advanced Materials Research
  • 作者Lee, Sang Youl; Oh, Jae Sub; Yang, Seung Dong; Yun, Ho Jin; Jeong, Kwang Seok; Kim, Yu Mi; Lee, Hi Deok; Lee, Ga Won
  • 卷第658卷
  • 电子ISSN1662-8985
  • 文件大小356.47KB
  • 发表时间2013-1
  • DOI10.4028/www.scientific.net/amr.658.120
  • 页码120-123
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