![[IEEE 1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (13-14 June 1988)] 1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference - Submicron wiring technology with tungsten and planarization]()
[IEEE 1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (13-14 June 1988)] 1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference - Submicron wiring technology with tungsten and planarizationKaanta, C.; Cote, W.; Cronin, J.; Holland, K.; Lee, P.-I.; Wright, T. · 1988