![SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 2 March 2003)] Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - <title>Design, simulation, and fabrication of a novel integrated microaccelerometer utilizing a post-CMOS fabrication technique</title>]()
SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 2 March 2003)] Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - <title>Design, simulation, and fabrication of a novel integrated microaccelerometer utilizing a post-CMOS fabrication technique</title>Song, In-Hyouk; Kopparthi, Sunitha; Ajmera, Pratul K.; Srivastava, Ashok; Varadan, Vijay K.; Kish, Laszlo B. · 2003