![SPIE Proceedings [SPIE International Symposium on Photonics and Applications - Singapore, Singapore (Monday 29 November 1999)] Design, Fabrication, and Characterization of Photonic Devices - <title>Novel U-groove channel for self-alignment of optical fibers with optical quality end-polished silicon rib waveguides using wet chemical micromachining techniques</title>]()
SPIE Proceedings [SPIE International Symposium on Photonics and Applications - Singapore, Singapore (Monday 29 November 1999)] Design, Fabrication, and Characterization of Photonic Devices - <title>Novel U-groove channel for self-alignment of optical fibers with optical quality end-polished silicon rib waveguides using wet chemical micromachining techniques</title>Ngo, Nam Quoc; Rosa, Michel A.; Sweatman, Denis R.; Dimitrijev, Sima; Harrison, H. Barry; Titmarsh, Andrew; Osinski, Marek; Chua, Soo-Jin; Chichibu, Shigefusa F. · 1999