海量图书期刊资源,随时随地畅享阅读乐趣
Simulation of Fogging Electrons in Electron Beam LithographyKotera, Masatoshi; Maekawa, Takeshi · Japanese Journal of Applied Physics · 2009
On simulation of resist profiles in electron beam lithographyP.R. Deshmukh; N.K.L. Raja; W.S. Khokle · 1988
Multiphysics Simulation of Nanopatterning in Electron Beam LithographyYasuda, Masaaki; Tada, Kazuhiro; Kotera, Masatoshi · Journal of Photopolymer Science and Technology · 2016
Monte Carlo Simulation of Electron Trajectory in Solid for Electron Beam LithographyNagao, Akie; Hosaka, Sumio · Key Engineering Materials · 2013
Monte Carlo Simulation of Projection Electron Beam LithographySun, X.; Xiao, P.; Ding, Z.J. · Solid State Phenomena · 2007
Monte Carlo simulation of electron beam lithography on topographical substratesZheng Cui · 1998
Molecular simulation of pattern formation in electron beam lithographyYasuda, Masaaki; Sakai, Hirofumi; Takai, Rina; Kawata, Hiroaki; Hirai, Yoshihiko · Microelectronic Engineering · 2013
Stochastic simulation of pattern formation in electron beam lithographyYasuda, Masaaki; Koyama, Masanori; Shirai, Masamitsu; Kawata, Hiroaki; Hirai, Yoshihiko · Journal of Vacuum Science & Technology B · 2018