![Direction-identical scratching method for fabricating nanostructures using a modified AFM nanoscratching system]()
Direction-identical scratching method for fabricating nanostructures using a modified AFM nanoscratching systemGeng, Yanquan; Yu, Bowen; Yan, Yongda; Hu, Zhenjiang; Zhao, Xuesen · Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena · 2015