Plasma molding over surface topography: Simulation of ion flow, and energy and angular distributions over steps in RF high-density plasmasDoosik Kim, ; Economou, D.J. · IEEE Transactions on Plasma Science · 2002

Plasma molding over surface topography: simulation and measurement of ion fluxes, energies and angular distributions over trenches in RF high density plasmasDoosik Kim, ; Economou, D.J.; Woodworth, J.R.; Miller, P.A.; Shul, R.J.; Aragon, B.P.; Hamilton, T.W.; Willison, C.G. · IEEE Transactions on Plasma Science · 2003

[IEEE ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science - New Orleans, LA, USA (4-7 June 2000)] ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science (Cat. No.00CH37087) - Two-dimensional simulation of ion energy and angular distributions at the wafer in low-pressure RF dischargesHu, Y.; Lin, T.L.; Huang, C.Y. · 2000

[IEEE IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference - Las Vegas, NV, USA (17-22 June 2001)] IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255) - Two-dimensional simulation of ion energy and angular distributions at the wafer in RF biased inductively coupled chlorine plasmasLin, W.C.; Hu, Y.; Lin, T.L. · 2001

Measurement of angular distributions of molecular flux effusing into vacuum.WATANABE, Yasuo; NANBU, Kenichi; MAEDA, Manabu; DENPOH, Kazuki; IGARASHI, Saburo · Transactions of the Japan Society of Mechanical Engineers Series B · 1991

Semi-analytical model for a static sheath including a weakly collisional presheathShirafuji, Tatsuru; Denpoh, Kazuki · Japanese Journal of Applied Physics · 2018

Particle-in-Cell/Monte Carlo Collision Simulations of Striations in Inductively Coupled PlasmasDenpoh, Kazuki · Japanese Journal of Applied Physics · 2012

Dissociative reactions induced by electron impact and electron transport in TEOS vaporKawaguchi, Satoru; Higuchi, Hisashi; Li, Hu; Denpoh, Kazuki; Takahashi, Kazuhiro; Satoh, Kohki · Japanese Journal of Applied Physics · 2019

Theoretical Study on the Angular Distribution of Molecular Flux Effusing into a Vacuum.Nanbu, Kenichi; Denpoh, Kazuki · Transactions of the Japan Society of Mechanical Engineers Series B · 1993

Another Possible Origin of Temperature and Pressure Gradients across Vane in the Crookes RadiometerDENPOH, Kazuki · Journal of the Vacuum Society of Japan · 2017

Self-Consistent Particle Simulation of Radio Frequency CF <sub/>4</sub> Discharge: Effect of Gas PressureDenpoh, Kazuki; Nanbu, Kenichi · Japanese Journal of Applied Physics · 2000

Monte Carlo Collision Simulation of Positive-Negative Ion Recombination for a Given Rate ConstantNanbu, Kenichi; Denpoh, Kazuki · Journal of the Physical Society of Japan · 1998

Spectral Emissivity of SiliconSatō, Tsutomu · Japanese Journal of Applied Physics · 1967

Surface Acoustic Wave SensorsShiokawa, Showko; Kondoh, Jun · Japanese Journal of Applied Physics · 2004

Perspectives in SonochemistryAndo, Takashi; Kimura, Takahide · Japanese Journal of Applied Physics · 2003

Structurally Stable Hyperbolic BeamChakraborty, Rijuparna; Ghosh, Ajay · Japanese Journal of Applied Physics · 2009

Peierls Phase TransitionKagoshima, Seiichi · Japanese Journal of Applied Physics · 1981

Piezoelectric Tensor of KNbO <sub/>3</sub>Günter, P. · Japanese Journal of Applied Physics · 1977

Plasma Anodic Oxidation of InPFuyuki, Takashi; Moriuchi, Sohta; Matsunami, Hiroyuki · Japanese Journal of Applied Physics · 1983

Linearity Characteristics of Multiplier PhototubesNonaka, Mamoru; Kashima, Takeo · Japanese Journal of Applied Physics · 1963